W monografii zaprezentowa­no metody korekcji ilościowej mikroanalizy rentgenowskiej cienkich warstw i układów wielowarstwowych o grubości od kilku nanometrów wzwyż.

Monografia dedykowana jest użytkownikom metody mi­kroanalizy rentgenowskiej, zwłaszcza tych dziedzin nauki i techniki, w których opracowuje się i wytwarza nowe materiały (inżynieria materiałowa, elek­tro­nika, optyka, fizyka, chemia). Może stanowić pomoc w ba­daniach praktycznych, zwią­za­nych z kontrolą jakości ma­te­riałów i wyrobów oraz oce­ną ich degradacji, a także w kon­troli zanieczyszczeń śro­do­wi­ska, geo- i kosmochemii, eks­per­tyzach sądowych itp. Stanowi również podręcznik dla studentów i doktorantów w dziedzinie inżynierii ma­teriałowej, metalurgii, fizyki i chemii.

The micro – analytical methods used to quantitatively determine the chemical composition of microstructural elements of micron and sub – micron dimensions, have a great and growing importance for developments in may branches of science and technology, particularly in fields where new materials are being developed and produced. The chemical analysis of very small areas requires special microanalytical methods and is difficult as the mass of the analyzed sensitivity and very good not exceed 10^-10 g. The methods must posses high analytical sensitivity and very good resolution because it is not possible to remove the material to be examined from matrix.

A major demand for the analysis of sub-micron elements of micro-structure comes from the materials engineering and metallurgy fields where the progress to produce new materials with specific tailored properties. This requires analysis of micro – areas such as precipitates, inclusions and admixtures having dimensions from materials. It is often necessary to determine the chemical composition of internal layers of sub-micron thickness to determine the concentration gradient within the phase, for example dendritic segregation, and determine the diffusion processes taking place between separate phases.

Content

Index of symbols

1. Introduction

2. Physical basic of quantitative X-ray microanalysis

   1. X-ray excitation volume in material

   2. Introduction to correction methods

3. X-ray microanalysis of phases bigger than X-ray excitation volume

   1. Methods based on models of electron scattering in sample

      1. Atomic number correction

      2. X-ray absorption correction

      3. Fluorescence corrections

   2. Methods based on φ (pz) function

   3. Mixed models methods

   4. Specific problems in microanalysis of elements emitting soft X-rays

4. X-ray microanalysis of phase bigger than primary X-ray excitation volume but smaller than secondary X-ray excitation one

   1. Corrections for fluorescence in the surrounding phase

   2. Corrections for fluorescence in the analyzed phase

5. X-ray microanalysis of thin films deposited on solid substrates

   1. Correction methods used in quantitative X-ray microanalysis of thin layers

      1. Calibration methods

      2. Monte Carlo methods

      3. Methods based on φ (pz) function

      4. Methods based on models of electron scattering in the material

      5. Fluorescence corrections

      6. The assessment of the correction methods used in the X-ray microanalysis of thin layers

   2. The experimental procedure for the quantitative X- ray microanalysis of thin coatings

6. X-ray microanalysis of multilayered samples

   1. Correction methods used in quantitative X-ray microanalysis of multilayer samples

   2. Experimental procedure of quantitative X-ray microanalysis of multilayer samples

7. X-ray microanalysis of micro –areas located at interface

   1. Correction methods in X-ray microanalysis of micro – areas located in the distance bigger than width of primary X-ray excitation zone

      1. Corrections for fluorescence in the adjoining phase

      2. Corrections for fluorescence in the analyzed phase

   2. Correction methods in X-ray microanalysis of micro – areas located in the distance smaller than width of primary X-ray excitation zone

      1. Determination of the φ (pz) function

      2. Determination of the concentration of elements in micro – areas situated at an interface

8. X-ray microanalysis of small particles

   1. X-ray microanalysis of small particles

      1. The methods based on geometric modeling of the particle shape

      2. Methods based on measurement of signal to background ratio

      3. Monte Carlo methods applied to individual particles

      4. Corrections for fluorescence

   2. The X-ray microanalysis of small particles occur in matrix

      1. Methods based on estimation of matrix share in X – radiation excitation volume

      2. Methods based on analyses conducted with various electrons beam diameters

      3. Monte Carlo methods applied to particles within solid matrix

      4. The author’s method

9. Concluding comments